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    • Structural improvement of SiGe films by C and F implantation and solid phase crystallization 

      Rodríguez Domínguez, Andrés; Olivares Roza, Jimena; Sangrador García, Jesús; Rodríguez Rodríguez, Tomás; Ballesteros Pérez, Carmen Inés; Castro Ponce, Mario; Gwilliam, Russell M. (01/02/2001)
      The crystallization kinetics and film microstructure of poly-SiGe layers obtained by solid-phase crystallization of unimplanted, C and F-implanted amorphous SiGe films have been studied. After crystallization, the F and C ...