Now showing items 1-2 of 2

    • Growth dynamics of reactive-sputtering-deposited AlN films 

      Auger, M.A.; Vázquez Burgos, Luís; Sánchez, O.; Jergel, M.; Cuerno Rejado, Rodolfo; Castro Ponce, Mario (01/06/2005)
      We have studied the surface kinetic roughening of AlN films grown on Si(100) substrates by dc reactive sputtering within the framework of the dynamic scaling theory. Films deposited under the same experimental conditions ...
    • Intrinsic anomalous surface roughening of TiN films deposited by reactive sputtering 

      Auger, M.A.; Vázquez Burgos, Luís; Cuerno Rejado, Rodolfo; Castro Ponce, Mario; Jergel, M.; Sánchez, O. (01/01/2006)
      We study surface kinetic roughening of TiN films grown on Si(100) substrates by dc reactive sputtering. The surface morphology of films deposited for different growth times under the same experimental conditions were ...