Electron energy distribution function in a pulsed 2.45GHz hydrogen magnetoplasma: Study of the decay
Fecha
01/11/2017Autor
Estado
info:eu-repo/semantics/publishedVersionMetadatos
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Este trabajo está dedicado al estudio de la función de distribución de energía electrónica (EEDF)
durante la desintegración (afterglow) de un magnetoplasma pulsado que trabaja a 2,45 GHz en
H2. Los experimentos se realizan bajo resonancia (B = 0.087T) y fuera de resonancia
(B = 0.120T) condiciones, a baja (0.38Pa) y alta presión (0.62Pa) para energías entrantes
que van de 300 W a 1500 W. Thiswork is devoted to the study of the Electron Energy Distribution Function (EEDF)
during the decay (afterglow) of a pulsed magnetoplasma working at 2.45GHz in
H2. The experiments are performed under resonance (B=0.087T) and off resonance
(B=0.120T) conditions, at low(0.38Pa) and high pressure (0.62Pa) for incoming power
ranging from300Wto1500W. At steady state i.e. before the discharge decay, theEEDF
profile exhibits three main components of which amplitude changes under experimental
conditions.Alowenergy component ("e<10eV) is observed whatever experimental
conditions are. An intermediate energy component is observed at energy ranging from
5eV to 15eV under resonance conditions. A high energy component is observed up
to 30eV in the EEDF tail, mainly under off resonance conditions. Standard fitting
methods are used to study the change of the different EEDF components versus time
during afterglow. We show that the three components stand for different times: The
low and high energy component stand from 10 s to 15 s and the intermediate energy
component stands for only 5 s. The different decay characteristic times are discussed
and the results are correlated to the electron recombination processes in the discharge,
to the reminiscent incoming power observed up to 30 s, and to the peak observed in
the reflected power during decays. We show that the low energy component decay
is due to the electron recombination process, which is limited by the charge transfer
process which produces H3
+.
Electron energy distribution function in a pulsed 2.45GHz hydrogen magnetoplasma: Study of the decay
Tipo de Actividad
Artículos en revistasISSN
2158-3226Palabras Clave
Reactor de plasmaPlasma reactor