Ion damage overrides structural disorder in silicon surface nanopatterning by low-energy ion beam sputtering
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Date
2015-02-26Author
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info:eu-repo/semantics/publishedVersionMetadata
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Ion damage overrides structural disorder in silicon surface nanopatterning by low-energy ion beam sputtering
Tipo de Actividad
Artículos en revistasISSN
0295-5075Materias/ categorías / ODS
Instituto de Investigación Tecnológica (IIT)Palabras Clave
Micro- and nanoscale pattern formation; Interface structure and roughness; Atomic, molecular, and ion beam impact and interactions with surfaces