Order enhancement and coarsening of self-organized silicon nanodot patterns induced by ion-beam sputtering
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Date
2008-06-09Author
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Order enhancement and coarsening of self-organized silicon nanodot patterns induced by ion-beam sputtering
Tipo de Actividad
Artículos en revistasISSN
0003-6951Materias/ categorías / ODS
Instituto de Investigación Tecnológica (IIT)Palabras Clave
surfaces, erosion, dots