Ion damage overrides structural disorder in silicon surface nanopatterning by low-energy ion beam sputtering
Fecha
2015-02-26Autor
Estado
info:eu-repo/semantics/publishedVersionMetadatos
Mostrar el registro completo del ítemResumen
Ion damage overrides structural disorder in silicon surface nanopatterning by low-energy ion beam sputtering
Tipo de Actividad
Artículos en revistasISSN
0295-5075Materias/ categorías / ODS
Instituto de Investigación Tecnológica (IIT)Palabras Clave
Micro- and nanoscale pattern formation; Interface structure and roughness; Atomic, molecular, and ion beam impact and interactions with surfaces